Invention Grant
- Patent Title: Method of manufacturing mold
- Patent Title (中): 模具制造方法
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Application No.: US13423543Application Date: 2012-03-19
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Publication No.: US08956560B2Publication Date: 2015-02-17
- Inventor: Yasuaki Ootera , Yoshiyuki Kamata , Naoko Kihara , Yoshiaki Kawamonzen , Takeshi Okino , Ryosuke Yamamoto , Tomoyuki Maeda , Norikatsu Sasao , Akiko Yuzawa , Takuya Shimada , Hiroyuki Hieda
- Applicant: Yasuaki Ootera , Yoshiyuki Kamata , Naoko Kihara , Yoshiaki Kawamonzen , Takeshi Okino , Ryosuke Yamamoto , Tomoyuki Maeda , Norikatsu Sasao , Akiko Yuzawa , Takuya Shimada , Hiroyuki Hieda
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Nixon & Vanderhye, P.C.
- Priority: JPP2011-203435 20110916
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B29C33/38 ; G11B5/855
Abstract:
In one embodiment, a method of manufacturing a mold includes: forming a first layer having an affinity to a second polymer on a substrate having an affinity to a first polymer; forming first and second openings in the first layer; filling a resist in the second openings and hardening the resist to obtain a hardened resist; and forming a second layer containing a block copolymer and causing it to self-assemble.
Public/Granted literature
- US20130069272A1 METHOD OF MANUFACTURING MOLD AND METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM Public/Granted day:2013-03-21
Information query
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