Invention Grant
US08957441B2 Integrated antenna device module for generating terahertz continuous wave and fabrication method thereof 有权
用于产生太赫兹连续波的集成天线装置模块及其制造方法

Integrated antenna device module for generating terahertz continuous wave and fabrication method thereof
Abstract:
The exemplary embodiments of the present invention include forming a photoconductor thin film on a front surface of a substrate; forming a photoconductor thin film pattern by patterning the photoconductor thin film; and forming a metal electrode on the photoconductor thin film pattern.
Information query
Patent Agency Ranking
0/0