Invention Grant
- Patent Title: Silicon pen nanolithography
- Patent Title (中): 硅笔纳米光刻
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Application No.: US13375361Application Date: 2010-06-04
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Publication No.: US08961853B2Publication Date: 2015-02-24
- Inventor: Chad A. Mirkin , Wooyoung Shim , Adam B. Braunschweig , Xing Liao , Jinan Chai , Jong Kuk Lim , Gengfeng Zheng , Zijian Zheng
- Applicant: Chad A. Mirkin , Wooyoung Shim , Adam B. Braunschweig , Xing Liao , Jinan Chai , Jong Kuk Lim , Gengfeng Zheng , Zijian Zheng
- Applicant Address: US IL Evanston
- Assignee: Northwestern University
- Current Assignee: Northwestern University
- Current Assignee Address: US IL Evanston
- Agency: Marshall, Gerstein & Borun LLP
- International Application: PCT/US2010/037428 WO 20100604
- International Announcement: WO2010/141836 WO 20101209
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; B81C1/00 ; B82Y10/00 ; B82Y40/00

Abstract:
Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
Public/Granted literature
- US20120167262A1 SILICON PEN NANOLITHOGRAPHY Public/Granted day:2012-06-28
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