Invention Grant
- Patent Title: Methods for forming templated materials
- Patent Title (中): 形成模板材料的方法
-
Application No.: US14491407Application Date: 2014-09-19
-
Publication No.: US08962354B2Publication Date: 2015-02-24
- Inventor: Monica Mathur , Michael Miller , Prashant B. Phatak
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L49/02 ; C23C14/22 ; C23C16/455 ; H01L29/51
Abstract:
Methods of forming layers can comprise defining a plurality of discrete site-isolated regions (SIRs) on a substrate, forming a first layer on one of the discrete SIRs, forming a second layer on the first layer, measuring a lattice parameter or an electrical property of the second layer, The process parameters for the formation of the first layer are varied in a combinatorial manner between different discrete SIRs to explore the possible layers that can result in suitable lattice matching for second layer of a desired crystalline structure.
Public/Granted literature
- US20150010705A1 Methods for Forming Templated Materials Public/Granted day:2015-01-08
Information query
IPC分类:
