Invention Grant
- Patent Title: Back-side illuminated image sensor with a junction insulation
- Patent Title (中): 具有结合绝缘的背面照明图像传感器
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Application No.: US14247084Application Date: 2014-04-07
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Publication No.: US08963273B2Publication Date: 2015-02-24
- Inventor: Michel Marty , François Roy , Jens Prima
- Applicant: STMicroelectronics S.A. , STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Montrouge FR Crolles
- Assignee: STMicroelectronics S.A.,STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics S.A.,STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Montrouge FR Crolles
- Agency: Seed IP Law Group PLLC
- Priority: FR1153183 20110412
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L27/146

Abstract:
A method for forming a back-side illuminated image sensor, including the steps of: a) forming, from the front surface, doped polysilicon regions, of a conductivity type opposite to that of the substrate, extending in depth orthogonally to the front surface and emerging into the first layer; b) thinning the substrate from its rear surface to reach the polysilicon regions, while keeping a strip of the first layer; c) depositing, on the rear surface of the thinned substrate, a doped amorphous silicon layer, of a conductivity type opposite to that of the substrate; and d) annealing at a temperature capable of transforming the amorphous silicon layer into a crystallized layer.
Public/Granted literature
- US20140217541A1 BACK-SIDE ILLUMINATED IMAGE SENSOR WITH A JUNCTION INSULATION Public/Granted day:2014-08-07
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