- 专利标题: Light emitting apparatus and method of fabricating the same
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申请号: US12173265申请日: 2008-07-15
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公开(公告)号: US08968822B2公开(公告)日: 2015-03-03
- 发明人: Shunpei Yamazaki , Masakazu Murakami , Satoshi Seo
- 申请人: Shunpei Yamazaki , Masakazu Murakami , Satoshi Seo
- 申请人地址: JP
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP
- 代理机构: Husch Blackwell LLP
- 优先权: JP2002-062763 20020307
- 主分类号: B05D7/00
- IPC分类号: B05D7/00 ; H01L27/32 ; H01L27/12 ; H01L51/00 ; H01L51/56
摘要:
Although an ink jet method known as a method of selectively forming a film of a high molecular species organic compound, can coat to divide an organic compound for emitting three kinds (R, G, B) of light in one step, film forming accuracy is poor, it is difficult to control the method and therefore, uniformity is not achieved and the constitution is liable to disperse. In contrast thereto, according to the invention, a film comprising a high molecular species material is formed over an entire face of a lower electrode connected to a thin film transistor by a coating method and thereafter, the film comprising the high molecular species material is etched by etching by plasma to thereby enable to selectively form a high molecular species material layer. Further, the organic compound layer is constituted by a material for carrying out luminescence of white color or luminescence of single color and combined with a color changing layer or a coloring layer to thereby realize full color formation.
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