发明授权
- 专利标题: Semiconductor storage device and manufacturing method thereof
- 专利标题(中): 半导体存储装置及其制造方法
-
申请号: US13425067申请日: 2012-03-20
-
公开(公告)号: US08969983B2公开(公告)日: 2015-03-03
- 发明人: Hiroyuki Kanaya
- 申请人: Hiroyuki Kanaya
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Knobbe, Martens, Olson & Bear LLP
- 优先权: JP2011-152788 20110711
- 主分类号: H01L29/82
- IPC分类号: H01L29/82 ; G11C11/00 ; H01L43/12 ; H01L43/08 ; H01L27/22 ; H01L21/00
摘要:
A memory includes a semiconductor substrate. Cell transistors are on the substrate. Contact plugs each of which is buried between the adjacent cell transistors and electrically connected to a diffusion layer between the adjacent cell transistors. An interlayer dielectric film buries gaps between the contact plugs. A storage element is provided not above the contact plugs but above the interlayer dielectric film. A sidewall film covers a part of a side surface of the storage element, and is provided to overlap with one of the contact plugs as viewed from above a surface of the semiconductor substrate. A lower electrode is provided between a bottom of the storage element and the interlayer dielectric film and between the sidewall film and one of the contact plugs, and electrically connects the storage element to one of the contact plugs.
公开/授权文献
信息查询
IPC分类: