Invention Grant
- Patent Title: Method of depositing organic material
- Patent Title (中): 沉积有机材料的方法
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Application No.: US13944479Application Date: 2013-07-17
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Publication No.: US08974858B2Publication Date: 2015-03-10
- Inventor: Jae-Wan Park , You-Min Cha , Won-Seok Cho , Jae-Mork Park , Jae-Hong Ahn , Min-Jeong Hwang , Tae-Wook Kim , Jong-Woo Lee , Tae-Seung Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Giheung-Gu ,Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu ,Yongin, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2009-0038907 20090504; KR10-2010-0010837 20100205
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/12 ; B05D1/02 ; B05D1/00 ; B05D3/04 ; C23C14/24 ; C23C14/56 ; C23C16/52 ; H01L51/00 ; H01L51/56

Abstract:
An apparatus for depositing an organic material and a depositing method thereof, wherein a deposition process is performed with respect to a second substrate while transfer and alignment processes are performed with respect to a first substrate in a chamber, so that loss of an organic material wasted in the transfer and alignment processes can be reduced, thereby maximizing material efficiency and minimizing a processing tack time. The apparatus includes a chamber having an interior divided into a first substrate deposition area and a second substrate deposition area, an organic material deposition source transferred to within ones of the first and second substrate deposition areas to spray particles of an organic material onto respective ones of first and second substrates and a first transferring unit to rotate the organic material deposition source in a first direction from one of the first and second substrate deposition areas to an other of the first and second substrate deposition areas.
Public/Granted literature
- US20130309403A1 APPARATUS FOR DEPOSITING ORGANIC MATERIAL AND DEPOSITING METHOD THEREOF Public/Granted day:2013-11-21
Information query
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