发明授权
- 专利标题: Integrated circuit having an edge passivation and oxidation resistant layer and method
- 专利标题(中): 具有边缘钝化和抗氧化层的集成电路和方法
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申请号: US13291664申请日: 2011-11-08
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公开(公告)号: US08975721B2公开(公告)日: 2015-03-10
- 发明人: Gerhard Schmidt
- 申请人: Gerhard Schmidt
- 申请人地址: AT Villach
- 专利权人: Infineon Technologies Austria AG
- 当前专利权人: Infineon Technologies Austria AG
- 当前专利权人地址: AT Villach
- 代理机构: Dicke, Billig & Czaja, PLLC
- 优先权: DE102006011697 20060314
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L21/337 ; H01L21/336 ; H01L29/40 ; H01L29/06 ; H01L29/739 ; H01L29/74 ; H01L29/808 ; H01L29/872
摘要:
An integrated circuit having a semiconductor component arrangement and production method is provided. The integrated circuit includes a semiconductor material region having a surface region and being laterally subdivided into a central region and into an edge region. The integrated circuit includes a passivation layer region, an oxide layer, and a VLD zone. The passivation layer region is formed on the surface region in the edge region and is configured to realize a field distribution at the edge of the semiconductor component arrangement. The oxide layer region is provided as a protection against oxidation on and in direct contact with the surface region of the semiconductor material region in the edge region. The oxide layer region or a part of the oxide layer region is formed in direct contact with a channel stopper region formed in the edge region.
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