Invention Grant
- Patent Title: Method for cleaning a contact pad of a microstructure and corresponding cantilever contact probe and probe testing head
- Patent Title (中): 清洁微结构接触垫和相应的悬臂接触探针和探头测试头的方法
-
Application No.: US13661980Application Date: 2012-10-26
-
Publication No.: US08981803B2Publication Date: 2015-03-17
- Inventor: Riccardo Vettori
- Applicant: Technoprobe S.p.A.
- Applicant Address: IT Cernusco Lombardone
- Assignee: Technoprobe S.p.A.
- Current Assignee: Technoprobe S.p.A.
- Current Assignee Address: IT Cernusco Lombardone
- Agency: Seed IP Law Group PLLC
- Priority: ITMI2010A000724 20100428
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R1/067 ; G01R31/28
Abstract:
A method for cleaning a contact pad of a microstructure or device to be tested when it is in electric contact with a measure apparatus, being obtained by electrically contacting a flexible probe with said contact pad. The method includes mechanically engaging a free end of the flexible probe in a manner that sticks the free end in the pad; and laterally flexing, by a tip charge, the flexible probe in a manner that keeps the free end stuck in the pad, so as to locally dig into a covering layer of the pad and realize a localized crushing thereof.
Public/Granted literature
Information query
