Invention Grant
US08981860B2 Use of electronic attenuator for MEMS oscillator overdrive protection 有权
电子衰减器用于MEMS振荡器超速保护

Use of electronic attenuator for MEMS oscillator overdrive protection
Abstract:
An apparatus includes a microelectromechanical system (MEMS) device configured as part of an oscillator. The MEMS device includes a mass suspended from a substrate of the MEMS, a first electrode configured to provide a first signal based on a displacement of the mass, and a second electrode configured to receive a second signal based on the first signal. The apparatus includes an amplifier coupled to the first electrode and a first node. The amplifier is configured to generate an output signal, the output signal being based on the first signal and a first gain. The apparatus includes an attenuator configured to attenuate the output signal based on a second gain and provide as the second signal an attenuated version of the output signal.
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