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US08983032B2 Spectroscopic apparatus 有权
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Spectroscopic apparatus
Abstract:
To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G1 to G3, the corresponding energy ranges for G1, G2, and G3 being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles α1 to α3 for G1 to G3 measured from the normal line of the diffraction grating are specified to be α1
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