X-ray system
    2.
    发明授权

    公开(公告)号:US12181427B1

    公开(公告)日:2024-12-31

    申请号:US18722957

    申请日:2022-12-13

    Abstract: A sample inspection system (100) includes an X-ray emitter, a collimator (170) and a first energy resolving detector (180) arranged along a symmetry axis (105). The X-ray emitter generates at least one focused conical shell beam (150) of X-ray radiation comprised of X-ray photons that propagate through a focal point on the symmetry axis downstream of the X-ray emitter. The collimator (170) has one or more channels, each channel being adapted to receive diffracted or scattered radiation propagating either along the symmetry axis, or parallel with the symmetry axis, or both along and parallel with the symmetry axis (105). Upon incidence of the conical shell beam (150) onto a sample (106) the first energy resolving detector (180) detects radiation diffracted or scattered by the sample (106) via the collimator (170).

    AN X-RAY SYSTEM
    3.
    发明申请

    公开(公告)号:US20240418658A1

    公开(公告)日:2024-12-19

    申请号:US18722957

    申请日:2022-12-13

    Abstract: A sample inspection system (100) includes an X-ray emitter, a collimator (170) and a first energy resolving detector (180) arranged along a symmetry axis (105). The X-ray emitter generates at least one focused conical shell beam (150) of X-ray radiation comprised of X-ray photons that propagate through a focal point on the symmetry axis downstream of the X-ray emitter. The collimator (170) has one or more channels, each channel being adapted to receive diffracted or scattered radiation propagating either along the symmetry axis, or parallel with the symmetry axis, or both along and parallel with the symmetry axis (105). Upon incidence of the conical shell beam (150) onto a sample (106) the first energy resolving detector (180) detects radiation diffracted or scattered by the sample (106) via the collimator (170).

    Material species identification system using material spectral data

    公开(公告)号:US12146844B2

    公开(公告)日:2024-11-19

    申请号:US17868283

    申请日:2022-07-19

    Inventor: Masaki Adachi

    Abstract: A system of collating a spectral data of an arbitrary material with spectral data of existing materials to identify the kind of the arbitrary material comprises a one-dimensional CNN processor calculating a characteristic value vector based on a spectral data of a material by a one-dimensional convolution neural network algorithm, and a metric learning processor computing a probability that the kind of the material is each kind of the existing materials from the characteristic value vector by a deep metric learning algorithm. The processors learn with the spectral data of existing materials to compute a probability for the kind of each material such that the probabilities for the kinds of the respective materials inputted for data for learning becomes maximum. When the data of the arbitrary material is inputted, the kind giving the maximum probability is identified as the kind of the arbitrary material with high precision.

    Shielding strategy for mitigation of stray field for permanent magnet array

    公开(公告)号:US11927549B2

    公开(公告)日:2024-03-12

    申请号:US17470183

    申请日:2021-09-09

    Abstract: The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.

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