发明授权
US08987832B2 Nonvolatile memory including memory cell array having three-dimensional structure
有权
包括具有三维结构的存储单元阵列的非易失性存储器
- 专利标题: Nonvolatile memory including memory cell array having three-dimensional structure
- 专利标题(中): 包括具有三维结构的存储单元阵列的非易失性存储器
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申请号: US14080823申请日: 2013-11-15
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公开(公告)号: US08987832B2公开(公告)日: 2015-03-24
- 发明人: Jintaek Park , Youngwoo Park
- 申请人: Jintaek Park , Youngwoo Park
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2012-0139781 20121204
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L27/115 ; H01L27/24 ; H01L29/423 ; H01L29/792
摘要:
A nonvolatile memory is provided which includes a plurality of channel layers and a plurality of insulation layers alternately stacked on a substrate in a direction perpendicular to the substrate, each of the plurality of channel layers including a plurality of channel films extending along a first direction on a plane parallel with the substrate; a plurality of conductive materials extending from a top of the channel layers and the insulation layers up to a portion adjacent to the substrate in a direction perpendicular to the substrate through areas among channel films of each channel layer; a plurality of information storage films provided between the channel films of the channel layers and the conductive materials; and a plurality of bit lines connected to the channel layers, respectively, wherein the conductive materials, the information storage films, and the channel films of the channel layers form a three-dimensional memory cell array, wherein the conductive materials form a plurality of groups, and wherein a distance between the groups is longer than a distance between conductive materials in each other.
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