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US08994103B2 High voltage metal-oxide-semiconductor transistor device and manufacturing method thereof 有权
高压金属氧化物半导体晶体管器件及其制造方法

High voltage metal-oxide-semiconductor transistor device and manufacturing method thereof
Abstract:
A lateral double-diffused metal-oxide-semiconductor transistor device includes a substrate having at least a shallow trench isolation formed therein, an epitaxial layer encompassing the STI in the substrate, a gate, and a drain region and a source region formed in the substrate at respective two sides of the gate. The epitaxial layer, the source region and the drain region include a first conductivity type. The gate includes a first portion formed on the substrate and a second portion extending into the STI.
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