Invention Grant
US08994126B2 Microelectromechanical system and method 有权
微机电系统及方法

Microelectromechanical system and method
Abstract:
A microelectromechanical system, including a first element and a second element, the first element having a first conductive surface facing a second conductive surface of the second element; wherein at least one of the first element and the second element is operable to constrainedly move nearer and farther from the other element; and at least one insulating separating member which is operable to mechanically maintain a separation between the first surface and the second surface, wherein a minimal distance between a first projection of a first contact area of the insulating separating member and a second projection of a second contact area of the insulating separating member is larger than a minimal separation maintained by the insulating separating member between the first element and the second element.
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