发明授权
US08994940B2 Fine particle measurement apparatus and optical axis calibration method 有权
精细粒子测量装置和光轴校准方法

Fine particle measurement apparatus and optical axis calibration method
摘要:
Disclosed is a fine particle measurement apparatus including a light condensing unit that condenses irradiated light irradiated to a sample flow where fine particles pass through and directly propagates the light without scattering, and scattered light scattered by the fine particles to an optical receiver divided into a plurality of regions; a position controller that controls the relative positions of members of an optical path; and a control unit that detects positions of condensing spots of the irradiated light and the scattered light based on signal intensities of each region of the optical receiver, and controls the position controller such that the positions of the condensing spots of the irradiated light and the scattered light match with each other.
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