Invention Grant
US08999623B2 Degradable neutral layers for block copolymer lithography applications
有权
用于嵌段共聚物光刻应用的可降解中性层
- Patent Title: Degradable neutral layers for block copolymer lithography applications
- Patent Title (中): 用于嵌段共聚物光刻应用的可降解中性层
-
Application No.: US13831193Application Date: 2013-03-14
-
Publication No.: US08999623B2Publication Date: 2015-04-07
- Inventor: Padma Gopalan , Daniel Patrick Sweat , Jonathan Woosun Choi , Myungwoong Kim
- Applicant: Wisconsin Alumni Research Foundation
- Applicant Address: US WI Madison
- Assignee: Wiscousin Alumni Research Foundation
- Current Assignee: Wiscousin Alumni Research Foundation
- Current Assignee Address: US WI Madison
- Agency: Bell & Manning, LLC
- Main IPC: G03C1/00
- IPC: G03C1/00 ; G03F7/00 ; B32B27/30 ; B82Y30/00 ; C09D153/00

Abstract:
Polymer films comprising crosslinked random copolymers and methods for making the films are provided. Also provided are polymer films comprising random copolymers that are covalently linked to an underlying substrate. The polymer films can be incorporated into structures in which the films are employed as surface-modifying layers for domain-forming block copolymers and the structures can be used for pattern transfer applications via block copolymer lithography. The crosslinks between the random copolymer chains in the polymer films or the links between the random copolymer chains and the substrate surface are characterized in that they can be cleaved under relatively mild conditions.
Public/Granted literature
- US20140263164A1 DEGRADABLE NEUTRAL LAYERS FOR BLOCK COPOLYMER LITHOGRAPHY APPLICATIONS Public/Granted day:2014-09-18
Information query