Invention Grant
US08999771B2 Protection layer for halftone process of third metal 有权
第三金属半色调处理保护层

Protection layer for halftone process of third metal
Abstract:
A thin-film transistor having a protection layer for a planarization layer. The protection layer prevents reduction of the planarization layer during an ashing process, thereby preventing the formation of a steeply tapered via hole through the planarization layer. In this manner, the via hole may be coated with a conductive element that may serve as a conductive path between a common electrode and the drain of the transistor.
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