Invention Grant
- Patent Title: Protection layer for halftone process of third metal
- Patent Title (中): 第三金属半色调处理保护层
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Application No.: US13631385Application Date: 2012-09-28
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Publication No.: US08999771B2Publication Date: 2015-04-07
- Inventor: Ming-Chin Hung , Byung Duk Yang , Kyung Wook Kim , Shih Chang Chang
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Main IPC: H01L21/335
- IPC: H01L21/335 ; H01L21/768 ; H01L27/12

Abstract:
A thin-film transistor having a protection layer for a planarization layer. The protection layer prevents reduction of the planarization layer during an ashing process, thereby preventing the formation of a steeply tapered via hole through the planarization layer. In this manner, the via hole may be coated with a conductive element that may serve as a conductive path between a common electrode and the drain of the transistor.
Public/Granted literature
- US20140091390A1 Protection Layer for Halftone Process of Third Metal Public/Granted day:2014-04-03
Information query
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