Invention Grant
US09006656B2 Imaging apparatus using talbot interference and adjusting method for imaging apparatus
有权
使用talbot干涉的成像装置和成像装置的调整方法
- Patent Title: Imaging apparatus using talbot interference and adjusting method for imaging apparatus
- Patent Title (中): 使用talbot干涉的成像装置和成像装置的调整方法
-
Application No.: US13824974Application Date: 2011-10-11
-
Publication No.: US09006656B2Publication Date: 2015-04-14
- Inventor: Hidenosuke Itoh , Kentaro Nagai
- Applicant: Hidenosuke Itoh , Kentaro Nagai
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Division
- Priority: JP2010-235490 20101020; JP2011-172973 20110808
- International Application: PCT/JP2011/073773 WO 20111011
- International Announcement: WO2012/053459 WO 20120426
- Main IPC: G01T1/17
- IPC: G01T1/17 ; G01B9/02 ; G01N23/04 ; G21K1/06

Abstract:
An imaging apparatus includes a diffraction grating which diffracts electromagnetic waves from an electromagnetic wave source, a shield grating which shields a part of the electromagnetic waves diffracted by the diffraction grating, a detector which detects an intensity distribution of the electromagnetic waves through the shield grating, and an adjusting unit which adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the detection result by the detector, wherein the adjusting unit divides the intensity distribution detected by the detector into a plurality of regions and adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the intensity distributions of the plurality of regions.
Public/Granted literature
- US20130181130A1 IMAGING APPARATUS USING TALBOT INTERFERENCE AND ADJUSTING METHOD FOR IMAGING APPARATUS Public/Granted day:2013-07-18
Information query