发明授权
- 专利标题: Method for producing spot size converter
- 专利标题(中): 光斑尺寸转换器的制造方法
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申请号: US14267556申请日: 2014-05-01
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公开(公告)号: US09023677B2公开(公告)日: 2015-05-05
- 发明人: Naoko Konishi , Hideki Yagi , Ryuji Masuyama , Yoshihiro Yoneda
- 申请人: Sumitomo Electric Industries, Ltd.
- 申请人地址: JP Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Smith, Gambrell & Russell LLP
- 优先权: JP2013-099339 20130509
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L31/0232 ; H01L31/18
摘要:
A method for producing a spot size converter includes the steps of forming a first insulator mask on a stacked semiconductor layer; forming first and second terraces, and a waveguide mesa disposed between the first and second terraces by etching the stacked semiconductor layer using the first insulator mask, the first terrace having first to fourth terrace portions, the second terrace having fifth to eighth terrace portions, the waveguide mesa having first to fourth mesa portions; forming a second insulator mask including a first pattern on the first terrace portion, a second pattern on the fifth terrace portion, a third pattern on the third and fourth mesa portions, and a fourth pattern that integrally covers a region extending from the fourth terrace portion to the eighth terrace portion through the fourth mesa portion; and selectively growing a semiconductor layer by using the second insulator mask.
公开/授权文献
- US20140335644A1 METHOD FOR PRODUCING SPOT SIZE CONVERTER 公开/授权日:2014-11-13
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