发明授权
- 专利标题： High surface resistivity electrostatic chuck
- 专利标题（中）： 高表面电阻率静电卡盘
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申请号： US13699279申请日： 2011-05-24
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公开(公告)号： US09025305B2公开(公告)日： 2015-05-05
- 发明人: Richard A. Cooke , Dale K. Stone , Lyudmila Stone , Julian Blake , David Suuronen
- 申请人： Richard A. Cooke , Dale K. Stone , Lyudmila Stone , Julian Blake , David Suuronen
- 申请人地址： US MA Eillerica US MA Gloucester
- 专利权人： Entegris, Inc.,Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Entegris, Inc.,Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Eillerica US MA Gloucester
- 代理机构： Hamilton Brook Smith & Reynolds, PC
- 国际申请： PCT/US2011/037712 WO 20110524
- 国际公布： WO2011/149918 WO 20111201
- 主分类号： H01T23/00
- IPC分类号： H01T23/00 ; H02N13/00 ; B23Q3/152 ; C04B37/00 ; H01L21/683 ; B05D5/12 ; C23F1/00
摘要：
In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 1011 ohms per square.
公开/授权文献
- US20130070384A1 High Surface Resistivity Electrostatic Chuck 公开/授权日：2013-03-21
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