发明授权
US09029067B2 Resin composition for making resist pattern insoluble, and method for formation of resist pattern by using the same 有权
用于制造抗蚀剂图案的树脂组合物不溶性,以及通过使用它们形成抗蚀剂图案的方法

Resin composition for making resist pattern insoluble, and method for formation of resist pattern by using the same
摘要:
A resist pattern-insolubilizing resin composition is used in a resist pattern-forming method. The resist pattern-insolubilizing resin composition includes solvent and a resin. The resin includes a first repeating unit that includes a hydroxyl group in its side chain and at least one of a second repeating unit derived from a monomer shown by a following formula (1-1) and a third repeating unit derived from a monomer shown by a following formula (1-2), wherein for example, R1 represents a hydrogen atom, A represents a methylene group, R2 represents a group shown by a following formula (2-1) or a group shown by a following formula (2-2), R3 represents a methylene group, R4 represents a hydrogen atom, and n is 0 or 1, wherein each of R34 represents at least one of a hydrogen atom and a linear or branched alkyl group having 1 to 10 carbon atoms.
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