发明授权
- 专利标题: Solid precursor sublimator
- 专利标题(中): 固体前驱体升华器
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申请号: US12351723申请日: 2009-01-09
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公开(公告)号: US09034105B2公开(公告)日: 2015-05-19
- 发明人: Trapti Chaubey , Mindi Xu
- 申请人: Trapti Chaubey , Mindi Xu
- 申请人地址: US CA Fremont
- 专利权人: American Air Liquide, Inc.
- 当前专利权人: American Air Liquide, Inc.
- 当前专利权人地址: US CA Fremont
- 代理商 Patricia E. McQueeney
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23C16/448
摘要:
An apparatus and method for holding a solid precursor in a sublimator such that the solid precursor can be vaporized for saturating a carrier gas. The apparatus may include alternating disks or shelves that form inner and outer passages, as well as spaces between the disks for fluidicly coupling the passages to create a winding, tortuous fluid flow path through the sublimator for optimizing solid vapor saturation. The method may include directing a carrier gas into a sublimation chamber, around the first shelf in the outer passage, over the first shelf in the space, around the second shelf in the inner passage, and back out of the sublimation chamber.
公开/授权文献
- US20090181168A1 SOLID PRECURSOR SUBLIMATOR 公开/授权日:2009-07-16
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