SOLID PRECURSOR SUBLIMATOR
    2.
    发明申请
    SOLID PRECURSOR SUBLIMATOR 有权
    实体前置机

    公开(公告)号:US20090181168A1

    公开(公告)日:2009-07-16

    申请号:US12351723

    申请日:2009-01-09

    CPC classification number: C23C16/4481

    Abstract: An apparatus and method for holding a solid precursor in a sublimator such that the solid precursor can be vaporized for saturating a carrier gas. The apparatus may include alternating disks or shelves that form inner and outer passages, as well as spaces between the disks for fluidicly coupling the passages to create a winding, tortuous fluid flow path through the sublimator for optimizing solid vapor saturation. The method may include directing a carrier gas into a sublimation chamber, around the first shelf in the outer passage, over the first shelf in the space, around the second shelf in the inner passage, and back out of the sublimation chamber.

    Abstract translation: 一种用于在升华器中保持固体前体的装置和方法,使得固体前体可以蒸发以使载气饱和。 该装置可以包括形成内部和外部通道的交替的盘或架,以及盘之间的空间,用于流体地联接通道,以产生通过升华器的绕曲曲折的流体流动路径,以优化固体蒸气饱和度。 该方法可以包括将载气引导到在外部通道中的第一搁板周围的空间中的第一搁板周围的升华室中,围绕内部通道中的第二搁板,并且从升华室返回。

    Preparation Of Adsorbents For Purifying Organosilicon Compounds
    3.
    发明申请
    Preparation Of Adsorbents For Purifying Organosilicon Compounds 有权
    用于净化有机硅化合物的吸附剂的制备

    公开(公告)号:US20080009645A1

    公开(公告)日:2008-01-10

    申请号:US11608096

    申请日:2006-12-07

    CPC classification number: C07F7/20 C07F7/21

    Abstract: A method for purifying organosilicon precursor compounds is provided. It includes preparation of the adsorbent with a treating compound. The thus-treated adsorbents can be used to remove impurities such as organic impurities and moisture from a composition containing an organosilicon containing compound. In this manner, it is able to purify organosilicon precursors (or solutions containing organosilicon precursors) without inducing decomposition of the organosilicon precursor.

    Abstract translation: 提供了一种纯化有机硅前体化合物的方法。 它包括用处理化合物制备吸附剂。 这样处理的吸附剂可用于从含有机硅化合物的组合物中除去有机杂质和水分等杂质。 以这种方式,能够纯化有机硅前体(或含有机硅前体的溶液)而不引起有机硅前体的分解。

    Solid precursor sublimator
    4.
    发明授权
    Solid precursor sublimator 有权
    固体前驱体升华器

    公开(公告)号:US09034105B2

    公开(公告)日:2015-05-19

    申请号:US12351723

    申请日:2009-01-09

    CPC classification number: C23C16/4481

    Abstract: An apparatus and method for holding a solid precursor in a sublimator such that the solid precursor can be vaporized for saturating a carrier gas. The apparatus may include alternating disks or shelves that form inner and outer passages, as well as spaces between the disks for fluidicly coupling the passages to create a winding, tortuous fluid flow path through the sublimator for optimizing solid vapor saturation. The method may include directing a carrier gas into a sublimation chamber, around the first shelf in the outer passage, over the first shelf in the space, around the second shelf in the inner passage, and back out of the sublimation chamber.

    Abstract translation: 一种用于在升华器中保持固体前体的装置和方法,使得固体前体可以蒸发以使载气饱和。 该装置可以包括形成内部和外部通道的交替的盘或架,以及盘之间的空间,用于流体地联接通道,以产生通过升华器的绕曲曲折的流体流动路径,以优化固体蒸气饱和度。 该方法可以包括将载气引导到在外部通道中的第一搁板周围的空间中的第一搁板周围的升华室中,围绕内部通道中的第二搁板,并且从升华室返回。

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