An exemplary illumination source for an inspection system includes a pulsed seed laser having a wavelength of approximately 1104 nm and a continuous wave, Raman seed laser having a wavelength of approximately 1160 nm. An optical coupler can combine outputs of the pulsed seed laser and the continuous wave, Raman seed laser. Pre-amplification stages can receive an output of the optical coupler. A power amplifier can receive an output of the pre-amplification stages. A sixth harmonic can be generated using the amplified, combined wavelength. Systems for inspecting a specimen such as a reticle, photomask or wafer can include one of the illumination sources described herein.