Invention Grant
US09046769B2 Pattern-forming method, and composition for forming resist underlayer film
有权
图案形成方法和用于形成抗蚀剂下层膜的组合物
- Patent Title: Pattern-forming method, and composition for forming resist underlayer film
- Patent Title (中): 图案形成方法和用于形成抗蚀剂下层膜的组合物
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Application No.: US14477306Application Date: 2014-09-04
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Publication No.: US09046769B2Publication Date: 2015-06-02
- Inventor: Yushi Matsumura , Shinya Minegishi , Satoru Murakami , Yusuke Anno , Shinya Nakafuji , Kazuhiko Komura , Kyoyu Yasuda
- Applicant: JSR Corporation
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-106746 20110511; JP2012-098261 20120423
- Main IPC: G03F7/027
- IPC: G03F7/027 ; G03F7/11 ; B44C1/22 ; C07D407/12 ; C07D487/04 ; H05K1/00 ; G03F7/004

Abstract:
Providing a method for forming a pattern capable of forming a resist underlayer film that can be easily removed using an alkali liquid while maintaining etching resistance is objected to. Provided by the present invention is a method for forming a pattern, the method including: (1) forming a resist underlayer film on a substrate using a composition for forming a resist underlayer film containing a compound having an alkali-cleavable functional group; (2) forming a resist pattern on the resist underlayer film; (3) forming a pattern on the substrate by dry etching of the resist underlayer film and the substrate, using the resist pattern as a mask; and (4) removing the resist underlayer film with an alkali liquid.
Public/Granted literature
- US20140371466A1 PATTERN-FORMING METHOD, AND COMPOSITION FOR FORMING RESIST UNDERLAYER FILM Public/Granted day:2014-12-18
Information query
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