Invention Grant
US09046769B2 Pattern-forming method, and composition for forming resist underlayer film 有权
图案形成方法和用于形成抗蚀剂下层膜的组合物

Pattern-forming method, and composition for forming resist underlayer film
Abstract:
Providing a method for forming a pattern capable of forming a resist underlayer film that can be easily removed using an alkali liquid while maintaining etching resistance is objected to. Provided by the present invention is a method for forming a pattern, the method including: (1) forming a resist underlayer film on a substrate using a composition for forming a resist underlayer film containing a compound having an alkali-cleavable functional group; (2) forming a resist pattern on the resist underlayer film; (3) forming a pattern on the substrate by dry etching of the resist underlayer film and the substrate, using the resist pattern as a mask; and (4) removing the resist underlayer film with an alkali liquid.
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