Invention Grant
US09048070B2 Dielectric window for plasma treatment device, and plasma treatment device
有权
等离子体处理装置的介质窗和等离子体处理装置
- Patent Title: Dielectric window for plasma treatment device, and plasma treatment device
- Patent Title (中): 等离子体处理装置的介质窗和等离子体处理装置
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Application No.: US14357155Application Date: 2012-11-08
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Publication No.: US09048070B2Publication Date: 2015-06-02
- Inventor: Caizhong Tian , Naoki Matsumoto , Koji Koyama , Naoki Mihara , Kazuki Takahashi , Jun Yoshikawa , Kazuki Moyama , Takehiro Tanikawa
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2011-247778 20111111
- International Application: PCT/JP2012/079006 WO 20121108
- International Announcement: WO2013/069739 WO 20130516
- Main IPC: H05B31/26
- IPC: H05B31/26 ; H01J37/32

Abstract:
A dielectric window for a plasma treatment device for a plasma treatment device that uses microwaves as a plasma source. The dielectric window is circular-plate-shaped and allows microwaves to propagate. The dielectric window has a recess that has an opening on the lower-surface side and that indents in the plate thickness direction of the dielectric window, and is provided to the lower surface at which plasma is generated when the dielectric window is provided to the plasma treatment device. The recess has a bottom surface extending in the direction perpendicular to the plate thickness direction, and a side surface extending in the plate thickness direction from the circumferential edge of the bottom surface toward the opening of the recess. In addition, an inclined surface extends at an incline relative to the plate thickness direction from the opening-side circumferential edge of the side surface toward the opening of the recess.
Public/Granted literature
- US20140312767A1 DIELECTRIC WINDOW FOR PLASMA TREATMENT DEVICE, AND PLASMA TREATMENT DEVICE Public/Granted day:2014-10-23
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