Invention Grant
US09051636B2 Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus 有权
有机层沉积装置,使用其的有机发光显示装置的制造方法以及有机发光显示装置

Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus
Abstract:
An organic layer deposition apparatus including a deposition source for discharging a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; a patterning slit sheet arranged opposite to the deposition source nozzle unit and including a plurality of patterning slits; an electrostatic chuck, a substrate being attachable to and detachable from the electrostatic chuck; chuck moving members combined with the electrostatic chuck and configured to move the electrostatic chuck; and guide members to guide movement of the chuck moving members, the chuck moving members including first magnetic force generators, and the guide members including second magnetic force generators corresponding to the first magnetic force generators, the chuck moving members movable on the guide members by magnetic forces generated by the first magnetic force generators and the second magnetic force generators.
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