Invention Grant
US09057709B2 Airflow-organization testing method for a clean room and system using the same method
有权
使用相同方法的洁净室和系统的气流组织测试方法
- Patent Title: Airflow-organization testing method for a clean room and system using the same method
- Patent Title (中): 使用相同方法的洁净室和系统的气流组织测试方法
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Application No.: US13704363Application Date: 2012-09-21
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Publication No.: US09057709B2Publication Date: 2015-06-16
- Inventor: Li Li , Wanshi Jin
- Applicant: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing
- Assignee: Beijing BOE Optoelectronics Technology Group Co., Ltd.
- Current Assignee: Beijing BOE Optoelectronics Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Sheridan Ross P.C.
- Priority: CN201110289975 20110926
- International Application: PCT/CN2012/081773 WO 20120921
- International Announcement: WO2013/044761 WO 20130404
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/94 ; G01P5/10 ; G01P5/00 ; G01J5/00

Abstract:
An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.
Public/Granted literature
- US20140061471A1 AIRFLOW-ORGANIZATION TESTING METHOD FOR A CLEAN ROOM AND SYSTEM USING THE SAME METHOD Public/Granted day:2014-03-06
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