Invention Grant
US09057709B2 Airflow-organization testing method for a clean room and system using the same method 有权
使用相同方法的洁净室和系统的气流组织测试方法

Airflow-organization testing method for a clean room and system using the same method
Abstract:
An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.
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