公开(公告)号：US09057709B2

公开(公告)日：2015-06-16

申请号：US13704363

申请日：2012-09-21

Applicant: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Li Li ,  Wanshi Jin

IPC: G01N21/00 ,  G01N21/94 ,  G01P5/10 ,  G01P5/00 ,  G01J5/00

CPC classification number: G01N21/94 ,  G01J5/0014 ,  G01J2005/0077 ,  G01J2005/0085 ,  G01P5/001 ,  G01P5/10 ,  G01P13/02

Abstract: An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.

Abstract translation: 公开了一种用于洁净室的气流组织测试方法和使用相同方法的系统。 用于洁净室的气流组织测试方法使用热成像装置来检测由洁净室中的样品气体形成的样品气流，并且样品气体与环境空气具有温度差。 洁净室的气流组织测试系统包括样品气体供应商和热成像装置，并且热成像装置可以连续检测样品气体的空间位置并将其显示在显示器上，从而提高检测精度和扩大检测 范围。