发明授权
US09063424B2 Isocyanurate compound for forming organic anti-reflective layer and composition including same
有权
用于形成有机抗反射层的异氰脲酸酯化合物及包含其的组合物
- 专利标题: Isocyanurate compound for forming organic anti-reflective layer and composition including same
- 专利标题(中): 用于形成有机抗反射层的异氰脲酸酯化合物及包含其的组合物
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申请号: US13393682申请日: 2010-09-14
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公开(公告)号: US09063424B2公开(公告)日: 2015-06-23
- 发明人: Hyo-Jung Roh , Dong-Kyu Ju , Hyun-Jin Kim , Deog-Bae Kim
- 申请人: Hyo-Jung Roh , Dong-Kyu Ju , Hyun-Jin Kim , Deog-Bae Kim
- 申请人地址: KR Incheon
- 专利权人: DONGJIN SEMICHEM CO., LTD.
- 当前专利权人: DONGJIN SEMICHEM CO., LTD.
- 当前专利权人地址: KR Incheon
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: KR10-2009-0086352 20090914
- 国际申请: PCT/KR2010/006281 WO 20100914
- 国际公布: WO2011/031123 WO 20110317
- 主分类号: G03F7/09
- IPC分类号: G03F7/09 ; C07D251/06 ; C08L81/00 ; H01L31/0216 ; C08F283/00 ; C08G75/00 ; C08K5/00 ; B05D3/02 ; G03F7/16 ; H01L21/02 ; H01L21/4757 ; H01L21/027 ; C08K5/42
摘要:
An isocyanurate compound for forming an organic anti-reflective coating layer, which has superior stability and etch rate at a high temperature, and which has a high refractive index, is represented by following Formula 1. In Formula 1, R is independently a hydrogen atom or a methyl group, R1 is independently a chain type or ring type saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 6 of hetero atoms, and R2 independently a chain type or ring type saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 15 of hetero atoms, wherein, R1 can have at least two bonding parts, and in the case that R1 has at least two bonding parts, the rest parts except R1 of the compounds represented by Formula 1 can connect to the R1 to form a polymer structure.
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