发明授权
- 专利标题: Laser conversion of high purity silicon powder to densified granular forms
- 专利标题(中): 将高纯度硅粉末激光转化成致密颗粒状
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申请号: US11982748申请日: 2007-11-05
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公开(公告)号: US09067792B1公开(公告)日: 2015-06-30
- 发明人: Alleppey V. Hariharan , Jagannathan Ravi
- 申请人: Alleppey V. Hariharan , Jagannathan Ravi
- 申请人地址: US MA Bedford
- 专利权人: Semlux Technologies, Inc.
- 当前专利权人: Semlux Technologies, Inc.
- 当前专利权人地址: US MA Bedford
- 代理机构: Pandiscio & Pandiscio
- 主分类号: C01B33/021
- IPC分类号: C01B33/021 ; C01B33/037
摘要:
The present invention relates to a direct method to convert fine and ultra fine silicon powder from polysilicon manufacturing sources such as fluid bed and free space reactors into densified granular forms. This conversion process is effected by the use of lasers of selective wavelengths from solid state diode or optically-pumped YAG sources to locally heat, melt and densify a controlled quantity of silicon powder, and comprises the steps of distributing dry silicon powder on an inert substrate, subjecting the silicon charge to a focused laser beam to realize melted and densified granular forms, and discharging the product. When adapted to high purity silicon powder, the end use for the densified silicon granular forms is primarily as feedstock for silicon-based semiconductor and photovoltaic manufacturing industries. The process, suitably modified, is adaptable to form other silicon body shapes and components.
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