发明授权
- 专利标题: AC power supply for sputtering apparatus
- 专利标题(中): 溅射装置的交流电源
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申请号: US13148154申请日: 2010-02-15
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公开(公告)号: US09068259B2公开(公告)日: 2015-06-30
- 发明人: Yoshio Yanagiya
- 申请人: Yoshio Yanagiya
- 申请人地址: JP Kanagawa
- 专利权人: ULVAC, INC.
- 当前专利权人: ULVAC, INC.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Cermak Nakajima & McGowan LLP
- 代理商 Tomoko Nakajima
- 优先权: JP2009-048667 20090302
- 国际申请: PCT/JP2010/000915 WO 20100215
- 国际公布: WO2010/100835 WO 20100910
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; H01J37/34 ; H02M1/34 ; H02M7/5387
摘要:
There is provided an AC power supply for a sputtering apparatus in which the AC power supply can prevent the induction of an arc discharge by suppressing an overvoltage to be generated when the polarity of each electrode is reversed. A bridge circuit made up of a plurality of switching transistors SW1-SW4 is disposed between positive and negative DC current output lines from a DC electric power supply source. An inductor DCL which makes a DC output to have a constant-current characteristic is disposed in at least one of the positive and the negative DC output lines from the DC electric power supply source to the bridge circuit, and a snubber circuit is disposed in parallel with inputs of the bridge circuit.
公开/授权文献
- US20110303534A1 AC POWER SUPPLY FOR SPUTTERING APPARATUS 公开/授权日:2011-12-15
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