AC POWER SUPPLY FOR SPUTTERING APPARATUS
    1.
    发明申请
    AC POWER SUPPLY FOR SPUTTERING APPARATUS 有权
    交流电源用于溅射装置

    公开(公告)号:US20110303534A1

    公开(公告)日:2011-12-15

    申请号:US13148154

    申请日:2010-02-15

    申请人: Yoshio Yanagiya

    发明人: Yoshio Yanagiya

    IPC分类号: H02M7/42 C23C14/34

    摘要: There is provided an AC power supply for a sputtering apparatus in which the AC power supply can prevent the induction of an arc discharge by suppressing an overvoltage to be generated when the polarity of each electrode is reversed. A bridge circuit made up of a plurality of switching transistors SW1-SW4 is disposed between positive and negative DC current output lines from a DC electric power supply source. An inductor DCL which makes a DC output to have a constant-current characteristic is disposed in at least one of the positive and the negative DC output lines from the DC electric power supply source to the bridge circuit, and a snubber circuit is disposed in parallel with inputs of the bridge circuit.

    摘要翻译: 提供一种用于溅射装置的交流电源,其中交流电源可以通过抑制当每个电极的极性反转时产生的过电压来防止电弧放电的感应。 由多个开关晶体管SW1-SW4构成的桥接电路配置在直流电源的正,负直流电流输出线之间。 使直流输出具有恒定电流特性的电感器DCL配置在从直流电源到桥接电路的正极和负极直流输出线中的至少一个中,缓冲电路并联设置 与桥接电路的输入。

    Power supply apparatus
    2.
    发明授权
    Power supply apparatus 有权
    电源设备

    公开(公告)号:US09210788B2

    公开(公告)日:2015-12-08

    申请号:US13001454

    申请日:2009-06-17

    摘要: There is provided a power supply apparatus which is easy in attempting to unify the thickness distribution of a thin film to be formed on the surface of a substrate even at the time of charging pulsed potential at a low frequency to targets that make respective pairs. The power supply apparatus of this invention has: a first discharge circuit which alternately charges predetermined potential to a pair of targets that are in contact with a plasma at a predetermined frequency; and a second discharge circuit which charges predetermined potential between the ground and the target, out of the pair of targets, that is not receiving output from the first discharge circuit.

    摘要翻译: 提供了一种供电装置,即使在将低频脉冲电位充电到成为相应对的目标的情况下,也可以容易地将待形成的薄膜的厚度分布统一在基板的表面上。 本发明的电源装置具有:以预定频率交替地将预定电位充电到与等离子体接触的一对靶的第一放电电路; 以及第二放电电路,其对从第一放电电路不接收输出的目标对中的地面和目标之间的预定电位进行充电。

    POWER SUPPLY APPARATUS
    3.
    发明申请
    POWER SUPPLY APPARATUS 有权
    电源设备

    公开(公告)号:US20110100807A1

    公开(公告)日:2011-05-05

    申请号:US13001454

    申请日:2009-06-17

    IPC分类号: C23C14/38

    摘要: There is provided a power supply apparatus which is easy in attempting to unify the thickness distribution of a thin film to be formed on the surface of a substrate even at the time of charging pulsed potential at a low frequency to targets that make respective pairs. The power supply apparatus of this invention has: a first discharge circuit which alternately charges predetermined potential to a pair of targets that are in contact with a plasma at a predetermined frequency; and a second discharge circuit which charges predetermined potential between the ground and the target, out of the pair of targets, that is not receiving output from the first discharge circuit.

    摘要翻译: 提供了一种供电装置,即使在将低频脉冲电位充电到成为相应对的目标的情况下,也可以容易地将待形成的薄膜的厚度分布统一在基板的表面上。 本发明的电源装置具有:以预定频率交替地将预定电位充电到与等离子体接触的一对靶的第一放电电路; 以及第二放电电路,其对从第一放电电路不接收输出的目标对中的地面和目标之间的预定电位进行充电。

    AC power supply for sputtering apparatus
    4.
    发明授权
    AC power supply for sputtering apparatus 有权
    溅射装置的交流电源

    公开(公告)号:US09068259B2

    公开(公告)日:2015-06-30

    申请号:US13148154

    申请日:2010-02-15

    申请人: Yoshio Yanagiya

    发明人: Yoshio Yanagiya

    摘要: There is provided an AC power supply for a sputtering apparatus in which the AC power supply can prevent the induction of an arc discharge by suppressing an overvoltage to be generated when the polarity of each electrode is reversed. A bridge circuit made up of a plurality of switching transistors SW1-SW4 is disposed between positive and negative DC current output lines from a DC electric power supply source. An inductor DCL which makes a DC output to have a constant-current characteristic is disposed in at least one of the positive and the negative DC output lines from the DC electric power supply source to the bridge circuit, and a snubber circuit is disposed in parallel with inputs of the bridge circuit.

    摘要翻译: 提供一种用于溅射装置的交流电源,其中交流电源可以通过抑制当每个电极的极性反转时产生的过电压来防止电弧放电的感应。 由多个开关晶体管SW1-SW4构成的桥接电路配置在直流电源的正,负直流电流输出线之间。 使直流输出具有恒定电流特性的电感器DCL配置在从直流电源到桥接电路的正极和负极直流输出线中的至少一个中,缓冲电路并联设置 与桥接电路的输入。