发明授权
- 专利标题: Cryopump and method of monitoring cryopump
- 专利标题(中): 冷冻泵和低温泵的监测方法
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申请号: US12805181申请日: 2010-07-16
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公开(公告)号: US09068564B2公开(公告)日: 2015-06-30
- 发明人: Toshiyuki Kimura
- 申请人: Toshiyuki Kimura
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Heavy Industries, Ltd.
- 当前专利权人: Sumitomo Heavy Industries, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Fishman Stewart Yamaguchi PLLC
- 优先权: JP2009-167436 20090716
- 主分类号: B01D8/00
- IPC分类号: B01D8/00 ; F04B37/08 ; F04D19/04 ; F04B37/14 ; F04B49/06 ; F04D27/00
摘要:
A controller performs, while controlling a first stage cryopanel to have a target temperature: a first determination in which it is determined whether a second stage cryopanel has been heated to a temperature higher than or equal to an alert temperature set to be lower than a maximum temperature of the second stage cryopanel set in the vacuum apparatus; and a second determination in which it is determined whether the second stage cryopanel is continuously being heated, for a preset period of time or longer, to a temperature within a temperature range set on condition that the alert temperature is a maximum. The controller may perform, while controlling the first stage cryopanel to have a target temperature, a third determination in which it is determined whether a state where an error between the temperature of the second stage cryopump during a pumping operation and the minimum attained temperature thereof measured in the initial stage of an operation of the cryopump occurs, has been continued for a continued period of time or longer, the continued period of time being set to be longer than the preset period of time.
公开/授权文献
- US20150152856A1 Cryopump and method of monitoring cryopump 公开/授权日:2015-06-04
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