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US09068564B2 Cryopump and method of monitoring cryopump 有权
冷冻泵和低温泵的监测方法

Cryopump and method of monitoring cryopump
摘要:
A controller performs, while controlling a first stage cryopanel to have a target temperature: a first determination in which it is determined whether a second stage cryopanel has been heated to a temperature higher than or equal to an alert temperature set to be lower than a maximum temperature of the second stage cryopanel set in the vacuum apparatus; and a second determination in which it is determined whether the second stage cryopanel is continuously being heated, for a preset period of time or longer, to a temperature within a temperature range set on condition that the alert temperature is a maximum. The controller may perform, while controlling the first stage cryopanel to have a target temperature, a third determination in which it is determined whether a state where an error between the temperature of the second stage cryopump during a pumping operation and the minimum attained temperature thereof measured in the initial stage of an operation of the cryopump occurs, has been continued for a continued period of time or longer, the continued period of time being set to be longer than the preset period of time.
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