Invention Grant
- Patent Title: Methods for fabricating nanocrystalline diamond film
- Patent Title (中): 制造纳米晶金刚石薄膜的方法
-
Application No.: US13799419Application Date: 2013-03-13
-
Publication No.: US09074281B2Publication Date: 2015-07-07
- Inventor: Wook Seong Lee , Hak Joo Lee , Young Joon Baik , Jong Keuk Park
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2012-0031830 20120328
- Main IPC: C23C16/27
- IPC: C23C16/27 ; C23C16/02

Abstract:
Methods for fabricating uniform nanocrystalline diamond thin films with minimized voids are presented. These uniform nanocrystalline diamond thin films can be formed on any number of treated silicon oxide surfaces such as on hydrogen plasma treated surfaces of silicon oxide-coated substrates or on hydrocarbon plasma pre-treated surfaces of silicon oxide-coated substrates. It is believed that treating these surfaces results in maximizing electrostatic attraction between these treated surfaces with nanodiamond particles during a subsequent ultrasonic seeding of the nanodiamond particles onto these threated surfaces. This can result in the nanodiamond particles being substantially uniformly distributed and bound on the treated silicon oxide surface.
Public/Granted literature
- US20130260157A1 NANOCRYSTALLINE DIAMOND FILM AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-10-03
Information query
IPC分类: