发明授权
US09076665B2 CMOS-compatible silicon nano-wire sensors with biochemical and cellular interfaces
有权
CMOS兼容的硅纳米线传感器,具有生化和蜂窝接口
- 专利标题: CMOS-compatible silicon nano-wire sensors with biochemical and cellular interfaces
- 专利标题(中): CMOS兼容的硅纳米线传感器,具有生化和蜂窝接口
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申请号: US12517230申请日: 2007-12-06
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公开(公告)号: US09076665B2公开(公告)日: 2015-07-07
- 发明人: Eric D. Stern , Tarek M. Fahmy , Mark A. Reed , James F. Klemic
- 申请人: Eric D. Stern , Tarek M. Fahmy , Mark A. Reed , James F. Klemic
- 申请人地址: US CT New Haven
- 专利权人: Yale University
- 当前专利权人: Yale University
- 当前专利权人地址: US CT New Haven
- 代理机构: Pabst Patent Group LLP
- 国际申请: PCT/US2007/024958 WO 20071206
- 国际公布: WO2008/153552 WO 20081218
- 主分类号: G01N27/414
- IPC分类号: G01N27/414 ; H01L29/06 ; B82Y10/00 ; H01L29/04 ; H01L29/16
摘要:
The systems and methods described herein include a sensor for suitable for sensing chemical and biological substances. The sensor comprises a semiconductor layer formed in or on a substrate and a channel having nano-scale dimensions formed in the semiconductor layer, where the structure creates an electrically conducting pathway between a first contact and a second contact on the semiconductor layer. In certain preferred embodiments, the nano-scale channel has a trapezoidal cross-section with an effective width and exposed lateral faces, where the effective width is selected to have same order of magnitude as a Debye length (LD) of the semiconductor material of which the semiconductor layer is formed.
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