Invention Grant
- Patent Title: Method and apparatus for improving particle performance
- Patent Title (中): 提高颗粒性能的方法和装置
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Application No.: US13626649Application Date: 2012-09-25
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Publication No.: US09076674B2Publication Date: 2015-07-07
- Inventor: Satbir Kahlon
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/67
Abstract:
A method for combinatorially processing a substrate is provided. The method includes providing a substrate disposed on a substrate support. The method further includes rigidly locking a top portion of a sleeve to a bottom portion of a process head of a combinatorial processing device, where the combinatorial processing device is operable to concurrently process different regions of the substrate differently. The method includes raising the substrate and the substrate support to contact a sealing surface of the sleeve with a surface of the substrate and combinatorially processing the different regions of the substrate.
Public/Granted literature
- US20140087490A1 Method and Apparatus for Improving Particle Performance Public/Granted day:2014-03-27
Information query
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