Invention Grant
- Patent Title: Thin film transistor array panel and method of manufacturing the same
- Patent Title (中): 薄膜晶体管阵列面板及其制造方法
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Application No.: US13875722Application Date: 2013-05-02
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Publication No.: US09076691B2Publication Date: 2015-07-07
- Inventor: Shin Il Choi , Sang Gab Kim , Su Bin Bae , Yu-Gwang Jeong
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2012-0155107 20121227
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/12 ; H01L27/32

Abstract:
A method of manufacturing a thin film transistor array panel includes: a gate insulating layer disposed on a gate electrode, a semiconductor disposed on the gate insulating layer, a source electrode opposite a drain electrode disposed on the semiconductor, a color filter disposed on the gate insulating layer, an overcoat disposed on the color filter and including an inorganic material. A first dry etching is performed using the photosensitive film pattern as a mask to etch the overcoat and provide a preliminary contact hole, through which a portion of the color filter is exposed. A second dry etching is performed using the overcoat as a mask to etch the color filter through the preliminary contact hole and to provide a contact hole, through which a portion of the drain electrode is exposed. A pixel electrode is connected to the drain electrode through the contact hole, on the overcoat.
Public/Granted literature
- US20140183535A1 THIN FILM TRANSISTOR ARRAY PANEL AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-07-03
Information query
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