发明授权
US09077060B2 Microelectromechanical system (MEMS) resonant switches and applications for power converters and amplifiers
有权
微机电系统(MEMS)谐振开关和功率转换器和放大器的应用
- 专利标题: Microelectromechanical system (MEMS) resonant switches and applications for power converters and amplifiers
- 专利标题(中): 微机电系统(MEMS)谐振开关和功率转换器和放大器的应用
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申请号: US12878237申请日: 2010-09-09
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公开(公告)号: US09077060B2公开(公告)日: 2015-07-07
- 发明人: Clark Tu-Cuong Nguyen , Yang Lin , Wei-Chang Li , Bongsang Kim
- 申请人: Clark Tu-Cuong Nguyen , Yang Lin , Wei-Chang Li , Bongsang Kim
- 申请人地址: US CA Oakland
- 专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人地址: US CA Oakland
- 代理商 John P. O'Banion
- 主分类号: H01P1/12
- IPC分类号: H01P1/12 ; H01H1/00 ; H01H50/00
摘要:
A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or “resoswitch”, with very high Q's, typically above 10000 in air, and higher in vacuum. Due to periodic constrained contacting of the contacts, the bandwidth of the switch is greatly improved. One or more oscillating elements may be vibrationally interconnected with conductive or nonconductive coupling elements, whereby increased bandwidths of such an overall switching system may be achieved. Using the resoswitch, power amplifiers and converters more closely approaching ideal may be implemented. Integrated circuit fabrication techniques may construct the resoswitch with other integrated CMOS elements for highly compact switching devices. Through introduction of specific geometries within the oscillating elements, displacement gains may be made where modal deflections are greatly increased, thereby reducing device drive voltages to 2.5 V or lower.