发明授权
US09080871B2 Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor
有权
具有非导电感测质量的微机电传感器，以及通过微机电传感器检测的方法
- 专利标题： Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor
- 专利标题（中）： 具有非导电感测质量的微机电传感器，以及通过微机电传感器检测的方法
-
申请号： US13612583申请日： 2012-09-12
-
公开(公告)号： US09080871B2公开(公告)日： 2015-07-14
- 发明人: Angelo Antonio Merassi , Biagio De Masi , Alberto Corigliano
- 申请人： Angelo Antonio Merassi , Biagio De Masi , Alberto Corigliano
- 申请人地址： IT Agrate Brianza
- 专利权人： STMicroelectronics S.r.l.
- 当前专利权人： STMicroelectronics S.r.l.
- 当前专利权人地址： IT Agrate Brianza
- 代理机构： Seed IP Law Group PLLC
- 优先权： ITTO2011A0874 20110930; ITTO2011A0881 20111003
- 主分类号： G01C19/56
- IPC分类号： G01C19/56 ; G01P15/125 ; G01C19/5762 ; G01C19/5755
摘要：
A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.
公开/授权文献
信息查询
