Invention Grant
- Patent Title: Under ball metallurgy (UBM) for improved electromigration
- Patent Title (中): 球磨机(UBM)用于改善电迁移
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Application No.: US13829242Application Date: 2013-03-14
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Publication No.: US09084378B2Publication Date: 2015-07-14
- Inventor: Charles L. Arvin , Minhua Lu , Eric D. Perfecto , Krystyna W. Semkow , Thomas A. Wassick
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Parashos T. Kalaitzis, Esq.
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L23/48 ; H01L23/52 ; H05K3/40 ; H01L23/31 ; H05K3/34 ; H01L23/00

Abstract:
An interconnect structure that includes a substrate having an electrical component present therein, and a under-bump metallurgy (UBM) stack that is present in contact with a contact pad to the electrical component that is present in the substrate. The UBM stack includes a metallic adhesion layer that is direct contact with the contact pad to the electrical component, a copper (Cu) seed layer that is in direct contact with the metallic adhesion layer, a first nickel (Ni) barrier layer that is present in direct contact with copper (Cu) seed layer, and a layered structure of at least one copper (Cu) conductor layer and at least one second nickel (Ni) barrier layer present on the first nickel (Ni) barrier layer. A solder ball may be present on second nickel (Ni) barrier layer.
Public/Granted literature
- US20140262458A1 UNDER BALL METALLURGY (UBM) FOR IMPROVED ELECTROMIGRATION Public/Granted day:2014-09-18
Information query
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