Invention Grant
US09086361B2 Detector device, inspection apparatus and method 有权
检测装置,检测装置及方法

Detector device, inspection apparatus and method
Abstract:
A detector device is described comprising an x-ray detector structure having a detection surface defining at least one separately addressable region for detecting incident x-ray radiation intensity thereon, wherein the separately addressable region is divided into a plurality of sub-regions provided on the detection surface each provided with a filter layer on the detection surface, the filter layers of a given separately addressable region comprising discrete and different materials with discrete defined and spectroscopically spaced x-ray absorption edges. A method of device manufacture, and an apparatus and method for the inspection and characterization of materials employing such a detector device, are also described.
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