Invention Grant
- Patent Title: Method for transferring a graphene layer
- Patent Title (中): 转移石墨烯层的方法
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Application No.: US13762819Application Date: 2013-02-08
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Publication No.: US09087692B2Publication Date: 2015-07-21
- Inventor: Corrado Accardi , Stella Loverso , Sebastiano Ravesi , Noemi Graziana Sparta
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITMI2012A0191 20120210
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L51/00 ; C01B31/04 ; B82Y30/00 ; B82Y40/00

Abstract:
A method transfers a graphene layer from a donor substrate onto a final substrate. The method includes: providing a metal layer on the donor substrate; and growing a graphene layer on the metal layer. The method also includes: laminating a dry film photo-resist on the graphene layer; laminating a tape on the dry film photo-resist; chemically. etching the metal layer, obtaining an initial structure that includes the tape, the dry film photo-resist and the graphene layer; laminating the initial structure on the final substrate; thermally realizing the tape, so as to obtain an intermediate structure that includes the dry film photo-resist, the graphene layer and the final substrate; removing the dry film photo-resist; and obtaining a final structure that includes the final substrate with a transferred graphene layer.
Public/Granted literature
- US20130210218A1 METHOD FOR TRANSFERRING A GRAPHENE LAYER Public/Granted day:2013-08-15
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