Invention Grant
US09087696B2 Systems and methods for non-periodic pulse partial melt film processing
有权
非周期脉冲部分熔膜加工的系统和方法
- Patent Title: Systems and methods for non-periodic pulse partial melt film processing
- Patent Title (中): 非周期脉冲部分熔膜加工的系统和方法
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Application No.: US13505961Application Date: 2010-11-02
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Publication No.: US09087696B2Publication Date: 2015-07-21
- Inventor: James S. Im , Yikang Deng , Qiongying Hu , Ui-Jin Chung , Alexander B. Limanov
- Applicant: James S. Im , Yikang Deng , Qiongying Hu , Ui-Jin Chung , Alexander B. Limanov
- Applicant Address: US NY New York
- Assignee: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Current Assignee: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Current Assignee Address: US NY New York
- Agency: Hale and Dorr LLP
- Agent Wilmer Cutler Pickering
- International Application: PCT/US2010/055106 WO 20101102
- International Announcement: WO2011/056787 WO 20110512
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/02 ; H01L29/04 ; H01L21/67 ; H01L29/786 ; B23K26/00 ; H01L21/268 ; H01L27/12
Abstract:
In one aspect, the present disclosure relates to a method of processing a thin film including, while advancing a thin film in a first selected direction, irradiating a first region of the thin film with a first laser pulse and a second laser pulse, each laser pulse providing a shaped beam and having a fluence that is sufficient to partially melt the thin film and the first region re-solidifying and crystallizing to form a first crystallized region, and irradiating a second region of the thin film with a third laser pulse and a fourth laser pulse, each pulse providing a shaped beam and having a fluence that is sufficient to partially melt the thin film and the second region re-solidifying and crystallizing to form a second crystallized region, wherein the time interval between the first laser pulse and the second laser pulse is less than half the time interval between the first laser pulse and the third laser pulse.
Public/Granted literature
- US20130105807A1 SYSTEMS AND METHODS FOR NON-PERIODIC PULSE PARTIAL MELT FILM PROCESSING Public/Granted day:2013-05-02
Information query
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