发明授权
US09087761B2 Solid-state imaging device including an on-chip lens with two inorganic films thereon
有权
固态成像装置，包括其上具有两个无机膜的片上透镜
- 专利标题： Solid-state imaging device including an on-chip lens with two inorganic films thereon
- 专利标题（中）： 固态成像装置，包括其上具有两个无机膜的片上透镜
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申请号： US13248491申请日： 2011-09-29
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公开(公告)号： US09087761B2公开(公告)日： 2015-07-21
- 发明人: Yoichi Otsuka , Akiko Ogino , Kiyotaka Tabuchi , Takamasa Tanikuni
- 申请人： Yoichi Otsuka , Akiko Ogino , Kiyotaka Tabuchi , Takamasa Tanikuni
- 申请人地址： JP Tokyo
- 专利权人： SONY CORPORATION
- 当前专利权人： SONY CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Dentons US LLP
- 优先权： JP2010-227755 20101007
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232 ; H01L27/146 ; H01L27/148 ; H04N9/04
摘要：
A solid-state imaging device includes a plurality of pixels formed on a semiconductor substrate and include a photoelectric conversion unit; a color filter on the pixels; an on-chip microlens made of an organic film on the color filter, corresponding to each of the pixels; a first inorganic film formed on a surface of the on-chip microlens and having a higher refraction index than the on-chip microlens; and a second inorganic film formed on a surface of the first inorganic film and having a lower refraction index than the on-chip microlens and the first inorganic film, in which at least the second inorganic film includes a non-lens area at an interface of an adjacent second inorganic film.
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