发明授权
- 专利标题: Apparatus and method of fabricating thin film pattern
- 专利标题(中): 制造薄膜图案的装置和方法
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申请号: US13096614申请日: 2011-04-28
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公开(公告)号: US09091873B2公开(公告)日: 2015-07-28
- 发明人: Jin Wuk Kim
- 申请人: Jin Wuk Kim
- 申请人地址: KR Seoul
- 专利权人: LG DISPLAY CO., LTD.
- 当前专利权人: LG DISPLAY CO., LTD.
- 当前专利权人地址: KR Seoul
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: KR10-2006-0056739 20060623
- 主分类号: G02F1/1333
- IPC分类号: G02F1/1333 ; H01L21/02 ; H01L21/312 ; H01L21/67 ; H01L51/56 ; H01L27/12
摘要:
A fabricating method and apparatus of a thin film pattern improves the reliability of forming the thin film pattern by a resist printing method. The apparatus includes a print roller device of a roll shape around which a blanket is wound; a spray device located around the print roller device for spraying an etch resist solution to the blanket; and a print plate of an engraved shape where a groove of a desired thin film shape and a projected part except the groove are formed, and the etch resist solution has a surfactant inclusive of an ethylene oxide fluorinated polymer material.
公开/授权文献
- US20110206847A1 APPARATUS AND METHOD OF FABRICATING THIN FILM PATTERN 公开/授权日:2011-08-25
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