Invention Grant
US09099273B2 Method for manufacturing nanostructures and cathode for field emission lighting arrangement
有权
制造用于场致发射照明装置的纳米结构和阴极的方法
- Patent Title: Method for manufacturing nanostructures and cathode for field emission lighting arrangement
- Patent Title (中): 制造用于场致发射照明装置的纳米结构和阴极的方法
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Application No.: US14345439Application Date: 2012-10-05
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Publication No.: US09099273B2Publication Date: 2015-08-04
- Inventor: Qiu-Hong Hu , Shang-Ray Yang , Kjell Bohlin
- Applicant: LIGHTLAB SWEDEN AB
- Applicant Address: SE Stockholm
- Assignee: Lightlab Sweden AB
- Current Assignee: Lightlab Sweden AB
- Current Assignee Address: SE Stockholm
- Agency: Babock IP, PLLC
- Priority: EP11183984 20111005
- International Application: PCT/EP2012/069787 WO 20121005
- International Announcement: WO2013/050570 WO 20130411
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01J1/304 ; H01J9/02 ; H01J63/04 ; C30B7/10 ; H01J1/36 ; H01J63/02 ; C30B29/16

Abstract:
The present invention relates to a method for manufacturing a plurality of nanostructures comprising the steps of providing a plurality of protruding base structures (104) arranged on a surface of a first substrate (102), providing a seed layer mixture, comprising a solvent/dispersant and a seed material, in contact with the protruding base structures, providing a second substrate arranged in parallel with the first substrate adjacent to the protruding base structures, thereby enclosing a majority of the seed layer mixture between the first and second substrates, evaporating the solvent, thereby forming a seed layer (110) comprising the seed material on the protruding base structures, removing the second substrate, providing a growth mixture, comprising a growth agent, in contact with the seed layer, and controlling the temperature of the growth mixture so that nanostructures (114) are formed on the seed layer via chemical reaction in presence of the growth agent.
Public/Granted literature
- US20140346976A1 METHOD FOR MANUFACTURING NANOSTRUCTURES AND CATHODE FOR FIELD EMISSION LIGHTING ARRANGEMENT Public/Granted day:2014-11-27
Information query
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