Invention Grant
- Patent Title: Spin-on carbon compositions for lithographic processing
- Patent Title (中): 用于光刻加工的旋转碳组合物
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Application No.: US14461109Application Date: 2014-08-15
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Publication No.: US09102129B2Publication Date: 2015-08-11
- Inventor: Vandana Krishnamurthy , Daniel M. Sullivan , Yubao Wang , Qin Lin , Sean Simmons
- Applicant: Brewer Science Inc.
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: G03F7/26
- IPC: G03F7/26 ; B32B33/00 ; C08G73/00 ; H01L21/033 ; H01L21/308 ; C09D179/08 ; C08G73/10 ; G03F7/09 ; B32B9/04

Abstract:
The invention described herein is directed towards spin-on carbon materials comprising polyamic acid compositions and a crosslinker in a solvent system. The materials are useful in trilayer photolithography processes. Films made with the inventive compositions are not soluble in solvents commonly used in lithographic materials, such as, but not limited to PGME, PGMEA, and cyclohexanone. However, the films can be dissolved in developers commonly used in photolithography. In one embodiment, the films can be heated at high temperatures to improve the thermal stability for high temperature processing. Regardless of the embodiment, the material can be applied to a flat/planar or patterned surface. Advantageously, the material exhibits a wiggling resistance during pattern transfer to silicon substrate using fluorocarbon etch.
Public/Granted literature
- US20140356593A1 SPIN-ON CARBON COMPOSITIONS FOR LITHOGRAPHIC PROCESSING Public/Granted day:2014-12-04
Information query
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